| PZT压电薄膜的压电系数d 31的测量及其微悬臂梁简谐振动模拟 |
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| 引用本文： | 周嘉,黄宜平.PZT压电薄膜的压电系数d 31的测量及其微悬臂梁简谐振动模拟[J].复旦学报(自然科学版),2002,41(2):187-191. |
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| 作者姓名： | 周嘉 黄宜平 |
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| 作者单位： | 1. 复旦大学微电子系,专用集成电路与系统国家重点实验室,上海,200433;华东理工大学石油化工学院机械工程系,上海,201512
2. 复旦大学微电子系,专用集成电路与系统国家重点实验室,上海,200433 |
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| 基金项目： | 国家自然科学基金资助项目(30170266) |
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| 摘 要： | 介绍了一种应用微悬臂梁结构，简单直接测量其中压电薄膜PZT的横向压电系数d31的方法。利用微悬臂梁器件本身和普通仪器，通过测量电压作用下微悬臂梁所产生的挠度值即可获得d31。还介绍了应用所测的d31对微悬臂梁的谐振进行有限元模拟的方法，及与振动实验结果的比较。
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| 关 键 词： | PZT压电薄膜 压电系数d31 测量 微悬臂梁 简谐振动 模拟 压电材料 |
| 文章编号： | 0427-7104(2002)02-0187-05 |
Measurement of Piezoelectric Coefficient d31 of PZT and the Harmonic Simulation for Its Microcantilever |
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| ZHOU Jia ,HUANG Yi ping.Measurement of Piezoelectric Coefficient d31 of PZT and the Harmonic Simulation for Its Microcantilever[J].Journal of Fudan University(Natural Science),2002,41(2):187-191. |
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| Authors: | ZHOU Jia HUANG Yi ping |
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| Institution: | ZHOU Jia 1,2,HUANG Yi ping 1 |
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| Abstract: | A simple and direct method for measuring the transverse piezoelectric coefficient d 31 of piezoelectric film is presented.The d 31 can be obtained by measuring the deflection produced by the voltage applied with a microcantilever device and some very common equipment.The harmonic simulation of FEM with the d 31 measured is shown and the comparison between the simulation and the vibration test is also presented. |
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| Keywords: | piezoelectric coefficient PZT microcantilever harmonic simulation |
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