| 硅基/聚酰亚胺湿度敏感元件研究 |
| |
| 引用本文： | 万灵,温殿忠,白续铎,唐祺,肖艳玲. 硅基/聚酰亚胺湿度敏感元件研究[J]. 黑龙江大学自然科学学报, 2005, 22(6): 822-825 |
| |
| 作者姓名： | 万灵 温殿忠 白续铎 唐祺 肖艳玲 |
| |
| 作者单位： | 黑龙江大学,集成电路重点实验室,黑龙江,哈尔滨,150080;黑龙江大学,集成电路重点实验室,黑龙江,哈尔滨,150080;黑龙江大学,集成电路重点实验室,黑龙江,哈尔滨,150080;黑龙江大学,集成电路重点实验室,黑龙江,哈尔滨,150080;黑龙江大学,集成电路重点实验室,黑龙江,哈尔滨,150080 |
| |
| 基金项目： | 黑龙江大学集成电路重点实验室项目 |
| |
| 摘 要： | 硅基/聚酰亚胺湿度传感器是采用集成电路光刻工艺在硅衬底上制成了以PI材料为介质膜,以金、铝为电极的电容式湿度传感器。给出了聚酰亚胺(PI)材料的感湿机理,硅基/聚酰亚胺湿敏电容的结构,以及湿度传感器的制造工艺、湿敏特性、工作原理及应用等。测试结果表明,在相对湿度为10%-90%RH范围内C-%RH曲线线性度良好。
|
| 关 键 词： | 硅基 聚酰亚胺 湿度传感器 IC工艺 |
| 文章编号： | 1001-7011(2005)06-0822-04 |
| 修稿时间： | 2005-06-11 |
Study on Si-substrate/polyimide humidity sensing device |
| |
| WAN Ling,WEN Dian-zhong,BAI Xue-duo,TANG Qi,XIAO Yan-ling. Study on Si-substrate/polyimide humidity sensing device[J]. Journal of Natural Science of Heilongjiang University, 2005, 22(6): 822-825 |
| |
| Authors: | WAN Ling WEN Dian-zhong BAI Xue-duo TANG Qi XIAO Yan-ling |
| |
| Abstract: | Si-substrate/polyimide humidity sensor is a kind of capacitive sensor with polyimide(PI) as a dielectric thin film and Au,Al as electrodes are prepared on a Si substrate using the photolithographic technology for integrated circuits.This paper presents humidity sensing principle of polyimide(PI);the structure of si-substrate/polyimide humidity sensing capacitance;and technologies of fabrication,the humidity sensing characteristics,the operation principle and the applications of the sensors.According to measure result,the sensors are desirable in the range of 10%-90%RH. |
| |
| Keywords: | Si-substrate polyimide humidity sensor the IC technology |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
