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多频法测量高温超导薄膜表面电阻
引用本文:李伟,阎少林,路荣涛,何明,步云英,毕笃彦.多频法测量高温超导薄膜表面电阻[J].南开大学学报,2004,37(1):107-111.
作者姓名:李伟  阎少林  路荣涛  何明  步云英  毕笃彦
作者单位:[1]南开大学信息技术科学学院,天津300061 [2]天津市半导体技术研究所,天津300051 [3]空军工程大学电子工程系,天津710038
基金项目:国家重点基础研究 ( 973 )专项经费资助项目
摘    要:本对介质谐振器法测量高温超导薄膜微波表面电阻的方法进行了详细的研究,并对测试系统的损耗提出了新的计算方法.由四个不同直径、相同高度的蓝宝石构成四个谐振器,对同一组铜膜进行测量,根据金属表面电阻与频率的关系,分析测试装置的损耗,从而更精确地测出薄膜的表面电阻.经实验证明,此方法能得到比传统测量更为精确的测量结果.

关 键 词:多频法  测量  表面电阻
文章编号:0465-7942(2004)01-0107-05
修稿时间:2002年5月20日

ANALYSIS OF ERROR FOR SURFACE RESISTANCE MEASUREMENTS OF SUPERCONDUCTING FILMS
LI Wei ,YAN Shaolin ,LU Rongtao ,HE Ming ,BU Yunying ,BI Duyan.ANALYSIS OF ERROR FOR SURFACE RESISTANCE MEASUREMENTS OF SUPERCONDUCTING FILMS[J].Acta Scientiarum Naturalium University Nankaiensis,2004,37(1):107-111.
Authors:LI Wei    YAN Shaolin  LU Rongtao  HE Ming  BU Yunying  BI Duyan
Institution:LI Wei 1,2,YAN Shaolin 1,LU Rongtao 1,HE Ming 1,BU Yunying 3,BI Duyan 2
Abstract:An intensive research on the dielectric resonator method appropriate to meansure microwave surface resitance of high temperature superconducting (HTS) films was carried out, and a new experimental method i.e.multi frequency method and a system loss formula were presented in this paper. A dielectricc resonator using four different sapphire rods with dimension of the same height but different diameter were employed to measure the surface resistances of Cu films at four different microwave frequencies. The measurement of system loss was then analysed by the system loss formula according to the frequency dependence of the metallic surface resistance. Consequently, the surface resistances of the HTS films could be determined more precisely. Our experimental results verified that the new method was more accurate than the conventional method.
Keywords:multi  frequency method  measurement  surface resistance
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