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脉冲激光辐照ZrO2薄膜剥落的研究
引用本文:张玉刚 赵建君. 脉冲激光辐照ZrO2薄膜剥落的研究[J]. 科学技术与工程, 2007, 7(16): 4013-40164021
作者姓名:张玉刚 赵建君
作者单位:军械工程学院,石家庄,050003;军械工程学院,基础部,石家庄,050003
摘    要:在得到高斯型短脉冲激光辐照光学薄膜温度分布的基础上,基于最大剪应力理论建立了光学薄膜发生迎光剥落的理论模型,得到了发生损伤的相应的应力分布。通过数值计算,分析了在短脉冲激光辐照时ZrO2薄膜的损伤情况,并计算出相应的损伤阈值。对理论计算与实验结论进行了比较,验证了理论模型的合理性。

关 键 词:激光物理  光学薄膜  损伤阈值
文章编号:1671-1819(2007)16-4013-05
修稿时间:2007-04-23

Theoretical Study of ZrO2 Film Irradiated by Short Pulsed Laser
ZHANG Yu-gang,ZHAO Jian-jun. Theoretical Study of ZrO2 Film Irradiated by Short Pulsed Laser[J]. Science Technology and Engineering, 2007, 7(16): 4013-40164021
Authors:ZHANG Yu-gang  ZHAO Jian-jun
Affiliation:Ordnance Engineering College, Department of Basic Courses, Ordnance Engineering CollegeI , Shijazhuang 050003, P. R. China
Abstract:A physical mold of ZrO2 film peeling caused by ns laser based on the theory of the most shearing strength is established. The distributions of stress and the relationship between the radius of peeled film and the energy of the incidening laser are studied. Through analyses, it is validated that the physical model is in accordance with the result of the experiment. The damage threshold of peeled film and the curve of the peeled film radius and the energy of the incidening laser are nearly the same as result of the experiment. The width of the pulse and the radius of facula have little effect on the damage threshold.
Keywords:laser physics optical film damage threshold
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