硅波导纵向多模式分离与交叉的片上解决方案 |
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引用本文: | 朱凝,骆晖,张凯,刘琼,汪洋.硅波导纵向多模式分离与交叉的片上解决方案[J].华南师范大学学报(自然科学版),2020,52(1):9-16. |
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作者姓名: | 朱凝 骆晖 张凯 刘琼 汪洋 |
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作者单位: | 华南师范大学半导体科学技术研究院//广东省光电功能材料与器件工程技术研究中心,广州 510631 |
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基金项目: | 中山市科技规划项目;广东省科技计划;广州市科技计划 |
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摘 要: | 为了解决硅纳米光子集成器件中纵向分布多模式波导的分离和交叉,提出了一种基于平面阶梯光栅和非对称定向耦合器的模式分离方案,并设计了一种带有曲面反射镜的器件,可实现多模式同时交叉.通过使用三维时域有限差分方法对器件进行仿真,结果表明:设计的平面阶梯光栅可同时分离不同的波长及模式(共9个通道),并具有低于-30 dB的串扰;曲面反射模式交叉器件可同时让3个模式进行交叉,且对所有模式均具有接近-40 dB的低串扰.
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关 键 词: | 模分复用 纵向多模 硅波导 模式解复用器 模式交叉 |
收稿时间: | 2019-09-17 |
The On-Chip Solutions to Mode Separation and Crossing of Vertical Multi-Modes in Silicon Waveguide |
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Institution: | Institute of Semiconductor Science and Technology, South China Normal University//Guangdong Engineering Technology Research Center of Optoelectronic Functional Materials and Devices, Guangzhou 510631, China |
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Abstract: | Solutions to mode separation and crossing of vertically distributed multi-modes inside silicon nanophotonic integrated devices are investigated. Mode demultiplexers based on both echelle gratings and asymmetric directional couplers are demonstrated. A device with curved reflectors which allows multi-modes to cross simultaneously is also designed. The simulation results based on the 3D Finite-Difference Time-Domain methods show that the echelle grating allows altogether 9 channels of different modes and wavelengths to be separated with crosstalks no more than -30 dB. The curved reflectors works properly for crossings of three modes, and the crosstalks are merely around -40 dB. |
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