| 氧浓度和衬底温度对透明导电Cd2SnO4薄膜光学性质的影响 |
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| 引用本文： | 董玉峰,王万录.氧浓度和衬底温度对透明导电Cd2SnO4薄膜光学性质的影响[J].重庆邮电学院学报(自然科学版),1999,11(4):12-15. |
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| 作者姓名： | 董玉峰 王万录 |
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| 作者单位： | 重庆大学理学院应用物理系!重庆400044 |
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| 摘 要： | 采用射频溅射方法在Ａｒ＋Ｏ２气氛中制备了Ｃｄ２ＳｎＯ４（ＣＴＯ）透明导电薄膜，报道了在不同氧浓度和衬底温度下该膜的透射率、消光系数和折射率随波长变化的情况。研究发现：氧浓度越高，衬底温度越高，则薄膜透射率、折射率越大，而消光系数越低。对这些结果，从ＣＴＯ膜的晶格九，氧空位等角度进行了理论分析。
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| 关 键 词： | 氧浓度 衬底温度 导电薄膜 光学性质 Cd2SnO4 |
Effect of O_2 Concentration and Substrate Temperature on the Optical Properties of Transparent Conductive Cd 2SnO 4 Thin Films |
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| DONG Yu feng,WANG Wan lu,LIAO Ke jun,Wu Bin.Effect of O_2 Concentration and Substrate Temperature on the Optical Properties of Transparent Conductive Cd 2SnO 4 Thin Films[J].Journal of Chongqing University of Posts and Telecommunications(Natural Sciences Edition),1999,11(4):12-15. |
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| Authors: | DONG Yu feng WANG Wan lu LIAO Ke jun Wu Bin |
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| Abstract: | In this paper, we report the optical properties of transparent conductive cadmium stannate (Cd 2SnO 4)thin films prepared by reactive sputtering in Ar+O 2 atmosphere as a function of wavelength, including the discussing of optical transmittance T, extinction coefficient k and refractive index n. Experimental results indicated that the transmittance T and refractive index n of CTO films are increased with the increasing of oxygen concentration and substrate temperature, while the extinction coefficient k is decreased. The experimental results are also discussed with the theories of crystal struture and the variation of the defect concentration. |
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| Keywords: | Cd_2SnO_4 films transmission spectra refractivity extinction coefficient |
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