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Inverse Design of Electron Lens
Authors:Tu Yan  Zhong Xuefei
Abstract:The inverse design of electron lens is realezed by two different methods in this paper. One is'damped least Square method and the other is the artificial neural network method. Their merits and defects are discussed according to our calculation results in the paper. In the condition of selecting the learning samples properly, the artificial neural network has obvious advantages in the inverse design of electron lens. It is an effective method to solve the inverse design problem in the electron optic system.
Keywords:Inverse design  Damped least Square method  Artificial neural network method  
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