| Zn1–xCaxO薄膜的结构和光学性质研究 |
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| 引用本文： | 汤引生,谢谦. Zn1–xCaxO薄膜的结构和光学性质研究[J]. 新乡学院学报(自然科学版), 2013, 0(2): 112-113,122 |
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| 作者姓名： | 汤引生 谢谦 |
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| 作者单位： | 商洛学院 物理与电子信息工程系,陕西 商洛 726000 |
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| 基金项目： | 商洛学院科研项目（11SKY009,10SKY026） |
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| 摘 要： | 采用磁控溅射法在玻璃基片上制备了Zn1-xCaxO薄膜.利用X射线衍射仪(XRD)和荧光光谱仪研究了Ca掺杂量对Zn1-xCaxO薄膜结构和光致发光特性的影响.结果显示:Zn1-xCaxO薄膜属于纤锌矿多晶结构;随着Ca含掺杂量的增加,薄膜衍射峰半高宽变大,薄膜质量变差;光致发光谱显示,随着Ca掺杂量的增加,紫外发光谱峰发生了蓝移.
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| 关 键 词： | 磁控溅射 Zn1-xCaxO薄膜 光致发光 |
Structure and Optical Properties of Zn1-xCaxO Thin Films |
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| TANG Yin-sheng,XIE Qian. Structure and Optical Properties of Zn1-xCaxO Thin Films[J]. , 2013, 0(2): 112-113,122 |
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| Authors: | TANG Yin-sheng XIE Qian |
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| Affiliation: | (Department of Physics and Electrical Information Engineering, Shangluo University, Shangluo 726000, China) |
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| Abstract: | Zn1-xCaxO thin film is fabricated on glass substrates by magnetron sputtering. The influences on the properties of structural of Zn1-xCaxO films and photoluminescence of Ca doping contents are studied by using the XRD, fluorescence spectroscope. The results are as followings： Zn1-xCaxO thin films belong to polycrystalline structure of wurtzite; with the increasing of Ca content, FWHM of diffraction peak widens and film quality deteriorates. Photoluminescence spectra show that with Ca doping concentration increasing, ultraviolet photoluminescence peak is blueshiftted. |
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| Keywords: | magnetron sputtering Zn1-xCaxO thin films photoluminescence |
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