| 扩散硅力敏器件 |
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| 引用本文： | 古启伦. 扩散硅力敏器件[J]. 汕头大学学报(自然科学版), 1987, 0(1) |
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| 作者姓名： | 古启伦 |
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| 作者单位： | 汕头大学计算机与信息工程系 |
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| 摘 要： | 本文叙述压力传感器的核心部件——扩散硅力敏器件的机理、制造方法.
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| 关 键 词： | 扩散硅 力敏 传感器 |
Diffused Silicon Pressure Sensitive Device |
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| Gu Qilun. Diffused Silicon Pressure Sensitive Device[J]. Journal of Shantou University(Natural Science Edition), 1987, 0(1) |
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| Authors: | Gu Qilun |
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| Affiliation: | Computer Science and Information Engineering Department |
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| Abstract: | This article describes the principle and manufacturing method of diffused silicon pressure sensitive device—a key element to pressure transducer. |
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| Keywords: | Diffused silicon Pressure-sensitive Transducer |
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