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激光干涉自动调焦原理和方法
引用本文:张凤林 刘铁根 等. 激光干涉自动调焦原理和方法[J]. 天津大学学报(自然科学与工程技术版), 1993, 0(2): 43-49
作者姓名:张凤林 刘铁根 等
作者单位:天津大学精密仪器工程系(张凤林,刘铁根,武进田),天津大学精密仪器工程系(赵彤)
摘    要:论述采用激光干涉原理自动调焦的方法,被调焦的光学系统视为双光束干涉光路的一部分,从干涉纺中取得光学系统的调焦信息,通过由CC电器件,微机,步进电机组成的光电系统对离焦量进行检测和补偿实现自动调焦,这种方法与已有的相关法和对比度法相比,调焦精度高,易于实现,有较高的实用性。

关 键 词:激光干涉 干涉图 自动调焦

OPTICAL AUTOMATIC FOCUSSING BY LASER WAVE INTERFERENCE
Zhang Fenglin Liu Tiegen Wu Jintian Zhao Tong. OPTICAL AUTOMATIC FOCUSSING BY LASER WAVE INTERFERENCE[J]. Journal of Tianjin University(Science and Technology), 1993, 0(2): 43-49
Authors:Zhang Fenglin Liu Tiegen Wu Jintian Zhao Tong
Affiliation:Dept. of Precision Instruments Engineering
Abstract:Optical automatic focussing based on laser light wave interference is described in this paper. The procedure is as follows: to transform the optical system into a part of an interference optical system. The focussing information can be retrieved from interferograms, the out of focussing information can be detected and compensated with the optical-electronic system consisting of CCD, a microcomputcr and steppermotor. The method is different from the exsisting ones such as correllation method and contrast-response characteristic. The focussing accuracy is high, easy to put into practice and has potential applications.
Keywords:laser wave interference   interferograms   automatic focussing
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