首页 | 本学科首页   官方微博 | 高级检索  
     检索      


Research on Abrasives in the Chemical Mechanical Polishing Process for Silicon Nitride Balls
Abstract:Silicon nitride (Si 3N 4) has been the main material for balls in ceramic ball bearings, for its lower density, high strength, high hardness, fine thermal stability and anticorrosive, and is widely used in various fields, such as high speed and high temperature areojet engines, precision machine tools and chemical engineer machines. Silicon nitride ceramics is a kind of brittle and hard material that is difficult to machining. In the traditional finishing process of silicon nitride balls, balls are lapped...
Keywords:silicon nitride ball  chemical mechanical polishing  abrasives  
本文献已被 维普 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号