| ZnO薄膜的椭圆偏振光谱研究 |
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| 引用本文： | 张斌恩,李书平,黄斌旺,姜伟,詹华瀚,李孔翌,康俊勇.ZnO薄膜的椭圆偏振光谱研究[J].厦门大学学报(自然科学版),2011,50(6):971-974. |
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| 作者姓名： | 张斌恩 李书平 黄斌旺 姜伟 詹华瀚 李孔翌 康俊勇 |
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| 作者单位： | 厦门大学物理与机电工程学院,微纳光电子材料与器件教育部工程研究中心,福建省半导体材料及应用重点实验室,福建厦门361005 |
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| 基金项目： | 国家自然科学基金重点专项，国家自然科学基金项目 |
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| 摘 要： | 采用椭圆偏振光谱法,在1.50～4.50eV光谱范围内,研究了在蓝宝石衬底上使用分子束外延方法制备的纤锌矿结构ZnO薄膜的光学性质.对椭圆偏振光谱拟合结果表明,坦吉扩展(Tanguy extend)色散公式能更准确、方便地描述ZnO薄膜带边附近的折射率和消光系数的色散关系.提供了ZnO薄膜在1.50～4.50eV光谱范围内的寻常光(o光)和非常光(e光)折射率和消光系数色散关系,为定量分析ZnO薄膜带边附近各向异性的光学性质提供了依据.
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| 关 键 词： | 椭圆偏振光谱 ZnO薄膜 光学常数 色散模型 |
Study on the ZnO Film by Spectroscopic Ellipsometry |
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| ZHANG Bin-en,LI Shu-ping,HUANG Bin-wang,JIANG Wei,ZHAN Hua-han,LI Kong-yi,KANG Jun-yong.Study on the ZnO Film by Spectroscopic Ellipsometry[J].Journal of Xiamen University(Natural Science),2011,50(6):971-974. |
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| Authors: | ZHANG Bin-en LI Shu-ping HUANG Bin-wang JIANG Wei ZHAN Hua-han LI Kong-yi KANG Jun-yong |
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| Institution: | ZHANG Bin-en,LI Shu-ping,HUANG Bin-wang,JIANG Wei,ZHAN Hua-han,LI Kong-yi,KANG Jun-yong (Engineering Research Center for Micro-nano Optoelectronic Materials & Devices of State Education Ministry,Key Laboratory of Semiconductors and Applications of Fujian Province,School of Physics and Mechanical & Electrical Engineering,Xiamen University,Xiamen 361005,China) |
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| Abstract: | The optical property of wurtzite ZnO film was investigated by spectroscopic ellipsometry(SE) in the spectrum range from 1.50 eV to 4.50 eV.The ZnO film was fabricated by molecular beam epitaxy(MBE) on the sapphire.Tanguy extend dispersion formulas was used to characterize optical property of wurtzite ZnO film.According to the fitting result of SE,Tanguy extend dispersion formulas can well characterize dispersion relation of refractive and extinction index near band edge.The dispersion relation of refractive... |
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| Keywords: | spectroscopic ellipsometry ZnO film optical constant dispersion model |
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