| 波像差法构建非球面干涉检测的误差分离模型 |
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| 引用本文： | 程灏波,冯之敬. 波像差法构建非球面干涉检测的误差分离模型[J]. 清华大学学报(自然科学版), 2006, 46(2): 187-190 |
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| 作者姓名： | 程灏波 冯之敬 |
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| 作者单位： | 清华大学,精密仪器与机械学系,北京,100084;北京理工大学,光电工程系,北京,100081;清华大学,精密仪器与机械学系,北京,100084 |
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| 基金项目： | 中国科学院资助项目;中国博士后科学基金 |
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| 摘 要： | 非球面元件光学干涉检测中,获得客观、准确的面形信息是实现元件快速、确定性制造的关键因素之一。为了实现大口径光学离轴非球面反射镜的高精度检测,对其干涉检测结果中的误差信息表现形式进行了分析研究,提出了一种基于将离轴非球面反射镜检测工装视为具有5维自由度空间刚体设想的误差分离矩阵,并从波像差理论出发,寻求出调整误差作用分量的分立表现形式及影响参数,建立了计算机辅助检测大口径光学离轴非球面反射镜的基本模型。仿真分析结果证实了这种方法的可行性。
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| 关 键 词： | 干涉检测 非球面 波像差 刚体 |
| 文章编号： | 1000-0054(2006)02-0187-04 |
| 修稿时间： | 2005-01-11 |
Error-separation model for interferometric testing aspheric surfaces based on wavefront aberrations |
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| CHENG Haobo,FENG Zhijing. Error-separation model for interferometric testing aspheric surfaces based on wavefront aberrations[J]. Journal of Tsinghua University(Science and Technology), 2006, 46(2): 187-190 |
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| Authors: | CHENG Haobo FENG Zhijing |
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| Abstract: | During interferometric testing,an objective,accurate evaluation of the surface information is one of the key factors needed to realize fast,deterministic manufacturing of large off-axis aspheric mirrors.An error-separation matrix for analysis of the error information in the testing results was developed by modeling the aspheric surface as a rigid body with five degrees of freedom.Wavefront aberration theory was used to find expressions for the adjustment errors and parameters for computerized testing of large aperture off-axis aspheric mirrors.Simulations correctly predicted interferometric patterns corresponding to different adjustment errors so the simulations can be used to quickly adjust the test system. |
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| Keywords: | interferometric testing aspheric surface wavefront aberration rigid body |
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