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解析式直流辉光放电等离子体理论模型的改进
引用本文:郭小明,PaiSiuting. 解析式直流辉光放电等离子体理论模型的改进[J]. 清华大学学报(自然科学版), 1996, 0(5)
作者姓名:郭小明  PaiSiuting
作者单位:清华大学电机工程与应用电子技术系!北京100084
摘    要:对作者前期建立的自洽、解析式直流辉光放电等离子体理论模型进行了改进。考虑到电子能量分布,认为电子碰撞电离速率系数f取决于电子的迁移速度VE和扩散速度VD,而不象以前假设电离速率系数f为一常数。另外,不再将形式为(C1cosmz+C2sinmz)的通解简化为形式为C(cosmz+sinmz)的特解,改进后的理论模型仍为自洽的解析式理论模型,它的适用范围更广,与实验结果更为接近。

关 键 词:辉光放电  解析式  低温等离子体

Analytic model modification for DC glow discharge plasma
Guo Xiaoming,Pai Siuting. Analytic model modification for DC glow discharge plasma[J]. Journal of Tsinghua University(Science and Technology), 1996, 0(5)
Authors:Guo Xiaoming  Pai Siuting
Abstract:In this presentation,the modification of the analytic model developed previously has been carried out with the consideration of electron energy distribution,i. e. the ionization coefficient f of electron collision with neutral moleculars is contributed from both of electron drift velocity and diffusion velocity while it was assumed to be a constant in the previous model. Another improvement is that the general solution like (C1 cosmz+C2sinmz) has been also taken in the present model while the particular solution like C(cosmz+sinmz)was employed in previous one. The modified model is also in self--consistent and analytic forms and the agreements between the theory and the experimental results are much better than before.
Keywords:glow discharge  analytic form  low temperature plasma
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