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强磁场下蒸镀法制备Co3O4薄膜
引用本文:陈晓,陈鹏,李丘林,刘伟. 强磁场下蒸镀法制备Co3O4薄膜[J]. 清华大学学报(自然科学版), 2009, 0(3): 440-442
作者姓名:陈晓  陈鹏  李丘林  刘伟
作者单位:清华大学,材料科学与工程系,北京,100084;清华大学,深圳研究生院,深圳,518055
摘    要:为了研究强磁场对蒸镀法制备Co3O4薄膜结构影响,以提高该材料的取向性,改善Co3O4薄膜的磁学性能,该文以99.99%的Co为原料,分别在无磁场和强磁场条件下低真空热蒸镀Co3O4薄膜,采用扫描电子显微镜、X射线衍射和振动样品磁强计研究了以Si(111)为基底的Co3O4薄膜晶粒尺寸、取向和磁性能。结果表明:随着磁场强度增加至4T,晶粒尺寸由200 nm减至20 nm,晶体由杂乱取向排列转为平行于磁场方向取向生长,薄膜的矫顽力减小,矩磁比增大至0.81。结果表明:强磁场对蒸镀法制备Co3O4薄膜晶粒的大小和取向有显著影响,能显著提高材料的矩磁比。

关 键 词:蒸镀  Co3O4  强磁场  晶粒尺寸  取向

Effect of a high magnetic field on evaporation deposition of Co_3O_4 thin films
CHEN Xiao,CHEN Peng,LI Qiulin,LIU Wei. Effect of a high magnetic field on evaporation deposition of Co_3O_4 thin films[J]. Journal of Tsinghua University(Science and Technology), 2009, 0(3): 440-442
Authors:CHEN Xiao  CHEN Peng  LI Qiulin  LIU Wei
Affiliation:1.Department of Material Science and Engineering;Tsinghua University;Beijing 100084;China;2.Graduate School at Shenzhen;Shenzhen 518055;China
Abstract:The orientation of Co3O4 thin films and their magnetic properties depend on the magnetic field strength during vacuum evaporation deposition of Co3O4 thin films.These effects were evaluated in the experiments using cobalt of 99.99% purity as the raw material and Si(111) as substrates.The evaporation pressure was 0.1 Pa and the magnetic fields were 0-4 T.The crystal size, orientation and magnetic performance were measured by scanning electronic microscope(SEM),X-ray diffraction(XRD),and vibrating sample magn...
Keywords:evaporation deposition  Co3O4  high magnetic field  grain size  orientation  
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