| 热丝CVD法制备金刚石膜 |
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| 引用本文： | 梁继然,常明,潘鹏.热丝CVD法制备金刚石膜[J].天津理工大学学报,2005,21(1):41-42,57. |
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| 作者姓名： | 梁继然 常明 潘鹏 |
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| 作者单位： | 天津理工大学,光电信息与电子工程系,天津,300191 |
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| 基金项目： | 天津市自然科学基金资助项目(023602511). |
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| 摘 要： | 采用热灯丝CVD、分次连续沉积的办法在硅衬底上制备金刚石膜．用RAMAN光谱、X-ray衍射、扫描电子显微镜(SEM)等多种技术对金刚石膜的形貌、成份、晶态等特性进行了分析，证实所获膜质量较好。
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| 关 键 词： | 金刚石膜 热丝化学气相沉积法 热灯丝CVD 扫描电子显微镜 RAMAN光谱 |
| 文章编号： | 1673-095X(2005)01-0041-02 |
Diamond thin film deposited by HFCVD |
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| LIANG Ji-ran,CHANG Ming,PAN Peng.Diamond thin film deposited by HFCVD[J].Journal of Tianjin University of Technology,2005,21(1):41-42,57. |
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| Authors: | LIANG Ji-ran CHANG Ming PAN Peng |
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| Abstract: | In order to get a thick diamond film, at the same condition the same silicon is used to deposited. Raman spectrum, X-ray spectrum and SEM are used to study the film produced by HFCVD. The film has the well-defined facet. |
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| Keywords: | diamond film HFCVD X-ray diffraction Scan electranic microscope |
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