| 离子束溅射非晶软磁薄膜 |
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| 引用本文： | 张维諴,张汝贞,郭贻诚. 离子束溅射非晶软磁薄膜[J]. 山东大学学报(理学版), 1988, 0(2) |
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| 作者姓名： | 张维諴 张汝贞 郭贻诚 |
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| 作者单位： | 山东大学物理系，山东大学物理系，山东大学物理系 |
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| 基金项目： | 中国科学院科学基金资助课题 |
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| 摘 要： | 用离子束溅射方法制成了非晶态软磁薄膜,具有良好的软磁特征。本文研究了离子能量、氩气压强、沉积速率和入射角对磁膜性能的影响。
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| 关 键 词： | 离子束溅射 非晶态薄膜 |
AMORPHOUS THIN FILMS WITH SOFT MAGNETIC PROPERTIES BY ION BEAM SPUTTERING |
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| Zhang Weixian Zhang Ruzhen Guo Yicheng. AMORPHOUS THIN FILMS WITH SOFT MAGNETIC PROPERTIES BY ION BEAM SPUTTERING[J]. Journal of Shandong University, 1988, 0(2) |
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| Authors: | Zhang Weixian Zhang Ruzhen Guo Yicheng |
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| Abstract: | Amorphous thin films with soft magnetic properties have been deposited by ion beam sputtering.The dependence of their magnetic properties on ion energy,argon pressure,deposition rate and incidence angle has been studied.Amorphous thin films with excellent soft magnetic properties were obtained. |
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| Keywords: | ion beam sputtering amorphous thin films |
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