| 实验参数对热丝CVD人造金刚石膜生长的影响 |
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| 引用本文： | 陈振环,徐菊芳,陈志明. 实验参数对热丝CVD人造金刚石膜生长的影响[J]. 科技资讯, 2011, 0(27): 92-93 |
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| 作者姓名： | 陈振环 徐菊芳 陈志明 |
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| 作者单位： | 长沙南方职业学院机械工程系,长沙,410208 |
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| 摘 要： | 在热丝CVD法生长金刚石膜的实验中,实验参数（包括灯丝温度、衬底温度、气体的碳氢比等等）对金刚石膜的生长起到了关键性的作用,它们的数值与金刚石膜的生长速率快慢与生长质量的高低密切相关。而且实验参数相互之间也有着密切的联系。
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| 关 键 词： | 金刚石膜 生长速率和质量 综述 灯丝温度 碳氢比 衬底温度 |
The impact of experimental parameters on the growth of the diamond films of hot filamenCVD |
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| Chen Zhen Huan Xu Ju Fang Chen Zhi Ming. The impact of experimental parameters on the growth of the diamond films of hot filamenCVD[J]. Science & Technology Information, 2011, 0(27): 92-93 |
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| Authors: | Chen Zhen Huan Xu Ju Fang Chen Zhi Ming |
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| Affiliation: | Chen Zhen Huan Xu Ju Fang Chen Zhi Ming(Chang Sha NanFang Vocational College Chang Sha 410208) |
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| Abstract: | In the experiments that growth of Diamond film by hot filament,Experimental,parameters （includingthe filament temperature, substratetemperature, gas hydrocarbon ratio,etc.） of diamond film,growth has played a key role, Their value is closely related to the quality. Between experimental parameters and also closely linked lity. |
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