应用于微结构制造自治系统的流水线作业调度

在微结构制造自治系统中,作业调度起到至关重要的作用。当前大多数的IC作业调度都是基于组合优化技术的,与以往这些工作不同,本文提出了一种新的基于流水线的调度方案。流水线对于串行作业来说能够达到最佳的运行效率,因此获取最优调度方案问题的关键即在于对IC制造设施进行配置,使之成为流水线。本文对于流水线调度的基本算法进行了讨论。对一个实例进行了基于流水线技术的调度,结果表明多数机器都能够达到100%的最高运行效率。本文所开发的一个调度模拟程序,除了对流水线运行的情况进行模拟外,还能够用作实际的调度器,进行最优化作业调度。

The Pipeline Style Job Scheduling Algorithm in an Electronic Manufacturing Automation System

Job schedulers can act as a very important role in an electronic manufacturing automation system.Most of the current IC job schedulers base on the technique of combinatorial optimization.Unlike these works,the paper presents a new way that treats an IC fab as a process pipeline.Obviously a pipeline is the most efficient way that carries out jobs in series.Knowing of this,the problem to obtain the best IC job schedules can be solved by configuring an IC fab into a process pipeline.Some basic rules are discussed on how to set up IC pipelines.An example is described,which exhibits the excellent scheduled results that most of the machines in the pipeline run in 100% efficiency.A program is also developed to simulate running pipelines.Such a program can be used as an applicable IC scheduler.