A1掺杂ZnO薄膜的结构研究

采用直流反应磁控溅射方法,在玻璃衬底上制备了Al掺杂ZnO薄膜.系统研究了不同氩氧体积比、不同退火温度和氛围、不同Al掺杂浓度对薄膜结构的影响.结果显示,Al掺杂ZnO薄膜为多晶薄膜,呈六角纤锌矿结构,制备条件和后期处理以及掺杂浓度对薄膜的微结构有着很大的影响.在氩氧体积比6:1条件下制备的薄膜,经真空500℃退火后具...

Study on structure of aluminum-doped zinc oxide films

Al doped ZnO thin films were prepared on glass slide substrates by magnetron sputtering.The effects of different argon oxygen ratios,the annealing temperature,the annealing ambient and Al content on the structure have been investigated systematically.The results show that all films can be indexed as ZnO hexagonal structure,and the processing parameters play an important role in the microstructures.Moreover,the film deposited at argon oxygen ratio of 6∶1 and annealed in vacuum at 500 ℃ shows good crystallization with preferred growth（002） direction.