流量计法测量微型溅射离子泵抽速的方法

介绍了基于流量计法原理搭建的抽速测量装置.在1×10^-4~1×10^-2Pa下使用磁悬浮转子真空计测量压力，当压力低于1×10^-4Pa时使用电离真空计测量压力.提出了一种测量电离真空计抽速与放气率的方法，测量了电离真空计在1×10^-6~1×10^-4Pa压力下的抽速与放气率.在搭建好的设备上，测量了微型溅射离子泵对氮气和氦气的抽速.使用COMSOL软件分析了不同压力下泵的放电状态并与实验结果进行对比，所得结果一致性好.流量计法的相对标准不确定度低于4.4%

Flowmeter Method of Measuring the Pumping Speed of Miniature Sputter Ion Pump

The pumping speed measuring apparatus， which employs the flowmeter method， was introduced. The pressure was measured by using a spinning rotor gauge(SRG) under 1×10^-4 to 1×10^-2Pa， and the ionization vacuum gauge was used when the pressure was lower than 10^-4Pa. A method of measuring the pumping speed and the outgassing rate of the extractor gauge was given. The pumping speed and the outgassing rate of the extractor gauge were measured under the pressure of 10^-6 to 10^-4Pa. The flowmeter method was used to measure the pumping speed of the miniature sputter ion pump(SIP)in nitrogen and helium. The discharge state of the miniature SIP under different pressures was analyzed using COMSOL， and the experimental results were in good agreement with the theoretical analysis. The combined standard uncertainty of the flowmeter method was less than 4.4%.