| 用干涉显微镜测量薄膜厚度的分析 |
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| 引用本文： | 周佩瑶,徐玉兰.用干涉显微镜测量薄膜厚度的分析[J].首都师范大学学报(自然科学版),1999,20(2):33-36. |
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| 作者姓名： | 周佩瑶 徐玉兰 |
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| 作者单位： | 天津大学物理系(周佩瑶，吴亚非)，首都师范大学(徐玉兰) |
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| 摘 要： | 分析了国产６ＪＡ型干涉显微镜测量薄膜厚度所产生的误差，给出了修正系数及实验结果
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| 关 键 词： | 干涉显微镜，薄膜，厚度，波长，误差 |
The Analysis of Measurement of Thin Film Thickness by Interfero Microscope |
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| Zhou Peiyao.The Analysis of Measurement of Thin Film Thickness by Interfero Microscope[J].Journal of Capital Normal University(Natural Science Edition),1999,20(2):33-36. |
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| Authors: | Zhou Peiyao |
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| Institution: | Zhou Peiyao(Tianjin University) Xu Yulan(Capilal Normal University) Wu Yafei(Tianjin University) |
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| Abstract: | This paper analyzed errors of measurement of thin film thickness by 6JA interfero microscope,gave corrective coefficient and experiment results. |
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| Keywords: | interfero microscope thin film thickness wavelength error |
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