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超导材料在激光成膜过程中的颗粒成因
引用本文:刘三秋,刘洪祥.超导材料在激光成膜过程中的颗粒成因[J].江西师范大学学报(自然科学版),1994,18(1):1-4,11.
作者姓名:刘三秋  刘洪祥
作者单位:江西师大物理系,江西师大物理系,江西省教委,江西师大物理系 南昌330027,南昌330027
摘    要:本文计算了激光融蚀超导材料靶时靶内部的温度分布和汽-固界面的移动速度.研究表明,界面内的过热点是超导材料在激光成膜过程中产生微爆炸形成颗粒的原因,讨论了提高成膜质量的方法.

关 键 词:激光  超导材料  成膜过程  颗粒

Internal Explosion in Laser Ablation of Super Superconducting Targets
Liu Sanqiu Li Fuquan Liu Hongxiang Liu Zhengdong.Internal Explosion in Laser Ablation of Super Superconducting Targets[J].Journal of Jiangxi Normal University (Natural Sciences Edition),1994,18(1):1-4,11.
Authors:Liu Sanqiu Li Fuquan Liu Hongxiang Liu Zhengdong
Abstract:The temperature profile inside a superconducting target in laser ablation is calculated and the receding velocity of the vaper-solid ineerface is determined. The study shows that ,there exist subsurface over-heating sports which product internalexplosion and how to enhance the thin film guality is discussed.
Keywords:laser  ablation  superconduct  thin film
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