| 感应加热电源在SiC单晶生长炉中的控制与应用 |
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| 引用本文： | 周立平.感应加热电源在SiC单晶生长炉中的控制与应用[J].科技情报开发与经济,2011,21(6):181-183. |
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| 作者姓名： | 周立平 |
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| 作者单位： | 太原理工大学,山西太原,030024;中国电子科技集团公司第二研究所,山西太原,030024 |
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| 摘 要： | 基于SiC单晶生长炉的特点,引入通过RS485串行通信的控制方式,实现SIEMENSS7-300PLC的CP340模块对感应加热电源的控制,并给出相应的程序实现及最后实验对比结果。
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| 关 键 词： | 感应加热电源 SiC单晶生长炉 控制方式 |
Discussion on the Control and Application of Induction Heating Power Supply in Sic Single Crystal Growth Furnace |
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| ZHOU Li-ping.Discussion on the Control and Application of Induction Heating Power Supply in Sic Single Crystal Growth Furnace[J].Sci-Tech Information Development & Economy,2011,21(6):181-183. |
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| Authors: | ZHOU Li-ping |
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| Institution: | ZHOU Li-ping |
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| Abstract: | Based on the characteristic of SiC single crystal growth furnace,this paper introduces the control mode of RS485 serial communication,realizes the control of induction heating power supply through the module CP340 of SIEMENS S7-300PLC,and puts forward relevant program implementation and the comparison results of the last experiment. |
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| Keywords: | induction heating power supply SiC single crystal growth furnace control mode |
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