| Abstract: | Three dimension free curves find wide applications in engineering. There is no problem to express them exactly mathematically, but th e reportage has not been done on the investigation of precision analysis of thre e-dimension free curves nanofabrication. Nanofabrication Precision includes the geometrical precision and the precision of driving system (below simply cal led the system precision). This paper submits the precision analysis method of c urve normal vector to analyze geometrical precision. ... |
