| 射频溅射法研制YBa_2Cu_3O_y高T_c超导薄膜 |
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| 引用本文： | 姚凯伦,吴荣金,刘祖黎.射频溅射法研制YBa_2Cu_3O_y高T_c超导薄膜[J].华中科技大学学报(自然科学版),1991(4). |
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| 作者姓名： | 姚凯伦 吴荣金 刘祖黎 |
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| 作者单位： | 华中理工大学物理系
(姚凯伦，吴荣金)，华中理工大学物理系(刘祖黎) |
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| 摘 要： | 本文采用射频溅射法研制YBa_2Cu_3O_7高T_c超导薄膜,研究了溅射电压、气流、气压、基片及热处理工艺对超导膜成分、相结构及超导性能的影响,所得到的超导薄膜T_c(R=0)=89K,临界电流密度10~4～10~5A·cm~(-2).
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| 关 键 词： | 超导薄膜 射频溅射 超导转变温度 临界电流 |
On the Preparation of YBa_2 Cu_3 O_y High T_y Superconducting Thin Film by the r.f. Sputtering Method |
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| Yao Kailun Wu Rongjin Liu Zuli.On the Preparation of YBa_2 Cu_3 O_y High T_y Superconducting Thin Film by the r.f. Sputtering Method[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,1991(4). |
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| Authors: | Yao Kailun Wu Rongjin Liu Zuli |
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| Institution: | Yao Kailun Wu Rongjin Liu Zuli |
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| Abstract: | |
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| Keywords: | Superconducting thin film r f sputtering Superconducting transition temperature Critical current |
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