| 碳化硅单晶微管道缺陷测试研究 |
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| 引用本文： | 章安辉,李劼.碳化硅单晶微管道缺陷测试研究[J].科技信息,2011(15):J0068-J0069,J0185. |
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| 作者姓名： | 章安辉 李劼 |
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| 作者单位： | 中国电子科技集团公司第四十六研究所;西安电子科技大学; |
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| 摘 要： | 本文着重研究了SiC晶体微管道测量的两种方法,即KOH腐蚀法和不腐蚀测试法,并对方法及其测量结果进行比较分析,实现对SiC单晶微管道缺陷这一表征SiC单晶质量的重要参数的快速准确的测量。
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| 关 键 词： | SiC 微管道 伯格斯矢量 腐蚀 |
Study on The Measurement of Micropipes in SiC Crystals |
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| ZHANG An-hui LI Jie.Study on The Measurement of Micropipes in SiC Crystals[J].Science,2011(15):J0068-J0069,J0185. |
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| Authors: | ZHANG An-hui LI Jie |
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| Institution: | ZHANG An-hui1 LI Jie2(1.The 46th Institute of Electronic Group Ompany,Tianjin,300192,China,2.Xidian University,Xi'an Shaanxi,710071) |
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| Abstract: | This article focuses on the studies of two test methods of micropipes in SiC crystals,namely using KOH etching or not.And a comparative analysis of the methods and results was made in this article.The fast and accurate measurement of the density of micropipes in SiC crystals was realized,which is one of important quality parameters. |
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| Keywords: | SiC Micropipe Burgers vector Etching |
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