周期可调谐金属光栅的制备工艺研究

介绍了一种制备金属可调谐光栅的新技术。首先采用紫外光刻技术将光栅结构制作至PDMS（聚二甲基硅氧烷）基底,并在其上蒸镀金属Cr层和Ag层,然后采取金属举离工艺得到金属光栅。利用PDMS高弹性的特点,通过控制PDMS纵、横向拉伸程度,对金属光栅周期进行连续、任意调谐,获得预定的目标周期。实验结果表明,金属光栅调谐范围超过其初始周期的100%。

Research on the Fabrication of Period-tunable Metal Grating

A new fabrication approach for period-tunable metal grating is introduced. The grating patterns on PDMS substrate are formed by ultraviolet (UV) lithography firstly, a thin layer of Cr and Ag are evaporated on the grating and then a lift-off process is employed. Due to the highly elastic property of the PDMS, the spatial period of grating could be continuously varied by mechanically stretching the PDMS parallel with or perpendicular to grating lines. The experimental results show that the elongation of the grating can exceed 100% of the initial length.