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采用模压技术的聚合物矩形光栅制作
引用本文:于百英,庄其仁,阮思旭.采用模压技术的聚合物矩形光栅制作[J].华侨大学学报(自然科学版),2007,28(2):151-154.
作者姓名:于百英  庄其仁  阮思旭
作者单位:华侨大学,信息科学与工程学院,福建,泉州,362021
基金项目:福建省自然科学基金资助项目(A0410019)
摘    要:在适当的压力条件下,通过控制压制的温度,制作出性能优良的PC(Polycarbonate)聚合物矩形光栅,光栅压制模板为采用感应耦合等离子体(ICP)技术刻蚀的熔融石英矩形光栅模板.对聚合物光栅的衍射观察和测量,证明用模压技术制作的PC聚合物矩形光栅具有很好的衍射效率和表面质量.

关 键 词:模压技术  聚合物  光栅  莫尔条纹
文章编号:1000-5013(2007)02-0151-04
修稿时间:2006-07-21

Research on Making the Polymer Rectangle Grating with Pressing Technology
YU Bai-ying,ZHUANG Qi-ren,RUAN Si-xu.Research on Making the Polymer Rectangle Grating with Pressing Technology[J].Journal of Huaqiao University(Natural Science),2007,28(2):151-154.
Authors:YU Bai-ying  ZHUANG Qi-ren  RUAN Si-xu
Institution:College of Information Science and Engineering, Huaqiao University, Quanzhou 362021, China
Abstract:A method of making the grating with mould pressing technology on the polymer optics material is presented in this paper.Under the proper pressure and temperature,we have made out of PC(Polycarbonate) polymer rectangle gratings with good performance.The mask pattern is the melting quartz rectangle grating carved by ICP(Inductively Coupled Plasma) technology.By observing and measuring diffraction of the polymer grating,we prove that the PC polymer rectangle grating made in mould pressing technology has a higher diffraction efficiency and good surface quality.
Keywords:mould pressing technology  polymer  grating  morie fringe
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