基于微流体芯片的准分子激光微加工技术的研究进展

微流体芯片作为一种新型的生物芯片被广泛应用在生命科学等领域，而准分子激光在生物芯片加工过程中有着快速、可控和高效的特点，正逐渐应用于微流体芯片的制造，并有着广阔的发展前景。简要介绍了微流体芯片的技术特点，重点介绍了近年来国外基于微流体芯片制作的准分子激光微加工技术的研究进展和应用，分析了影响准分子激光加工微流体芯片技术发展的因素，并对此技术的今后发展趋势进行了展望。

Progress of Excimer Laser Micromachining Based on Microfabrication of Microfludic Biochips

As a new type of bio-chips, Microfludic Bio-chips are being widely used in many fields such as life sciences. The Excimer Laser working process in the bio-chips have fast, controllable and efficient features, which are increasingly used in the manufacture of microfluidic chip and there are broad prospects for development. In this paper, the technical characterstic of microfludic biochips is summarized, the developing of researches and applications of excimer laser-based micro-processing chips in recent years is intorduced principally, and the factors of effect the development of the exeimer laser-based mierofabricationg of microfludie biochips are analyzed, the development trend of this technology is looked into the future.