| 硅器件工艺中的铁污染及其对器件特性的影响 |
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| 引用本文： | 张德贤.硅器件工艺中的铁污染及其对器件特性的影响[J].西安交通大学学报,1992,26(3):73-78. |
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| 作者姓名： | 张德贤 |
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| 作者单位： | 西安交通大学电气工程系 |
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| 摘 要： | 文中研究了硅器件的异常产生电流和异常特性,揭示了它们的产生原因均是硅器件中有铁污染。
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| 关 键 词： | 硅器件 污染 铁 |
Fe CONTAMINATION IN THE SILICON DEVICE TECHNOLOGY AND ITS EFFECT ON SILICON DEVICE CHARACTERISTICS |
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| Zhang Dexian.Fe CONTAMINATION IN THE SILICON DEVICE TECHNOLOGY AND ITS EFFECT ON SILICON DEVICE CHARACTERISTICS[J].Journal of Xi'an Jiaotong University,1992,26(3):73-78. |
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| Authors: | Zhang Dexian |
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| Institution: | Zhang Dexian Department of Electrical Engineering |
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| Abstract: | In this paper the abnormal generation current and the abnormal characteristics of the silicon de-
vice are investigated, and both of them are shown to result from the contamination of Fe in the silicon
device. |
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| Keywords: | silicon device iron contamination |
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