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Fractal characteristics of surface morphology for hydrogenated silicon films |
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| Institution: | HE Yuliang WAN Mingfang YUAN Kaihua RONG Ailun and WEI Xiwen (Amorphous Physics Research Laboratory, Beijing University of Aeronautics and Astronautics, Beijing 100083, China) Department of Physics,Dalian University of Tchnology,Dalian 116024,China |
| Abstract: | |
| Keywords: | micro-crystalline silicon films nano-crystalline silicon films fractal morphology |
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