| 磁控溅射制备的氧化钒薄膜的结构研究 |
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| 引用本文： | 王玫,崔敬忠.磁控溅射制备的氧化钒薄膜的结构研究[J].兰州大学学报(自然科学版),1999,35(1):62-66. |
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| 作者姓名： | 王玫 崔敬忠 |
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| 作者单位： | [1]兰州大学物理学系 [2]兰州物理研究所 |
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| 摘 要： | 用Ｘ射线光电子谱（ＸＰＳ），原子力显微镜（ＡＦＭ）和Ｘ射线衍射（ＸＲＤ）研究了磁控溅射制备的氧化钒薄膜的宏观、微观和电子学结构。建立了薄膜的相结构与ＸＰＳ谱中Ｖ２ｐ３／２特征峰的结合能之间的定量关系。给出了二氧化钒薄膜的ＡＦＭ像。所得到的二氧化钒热致变色薄膜的结构特性与光电特性相一致。
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| 关 键 词： | 氧化钒 薄膜 结构 磁控溅射 制备 |
Structure Characterization of Vanadium Oxide Thin Films Prepared by Magnetron Sputtering Methods |
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| Wang Mei ,Li Ximei ,Cui Jingzhong ,Da Daoan ,Jiang Wanshun ,Qiu Jiawen.Structure Characterization of Vanadium Oxide Thin Films Prepared by Magnetron Sputtering Methods[J].Journal of Lanzhou University(Natural Science),1999,35(1):62-66. |
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| Authors: | Wang Mei Li Ximei Cui Jingzhong Da Daoan Jiang Wanshun Qiu Jiawen |
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| Institution: | Wang Mei 1,Li Ximei 1,Cui Jingzhong 2,Da Daoan 2,Jiang Wanshun 2,Qiu Jiawen 2 |
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| Abstract: | Vanadium oxide thin films prepared by magnetron sputtering methods have been studied by X ray photoelectron spectroscopy,atomic force microscopy and X ray diffraction. The quantitative relations between the phases of vanadium oxide films and the V 2 p 3/2 binding energy in the XPS were obtained. The AFM images show the vanadium dioxide thin films clearly. The electronic, micro and macro properties of VO 2 thin film are coincident with its optical and electrical measurements. |
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| Keywords: | vanadium oxide thin film structure |
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