| 提高方形硅膜压力传感器灵敏度的几个重要措施 |
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| 引用本文： | 冯景星. 提高方形硅膜压力传感器灵敏度的几个重要措施[J]. 福州大学学报(自然科学版), 1992, 0(3): 28-31 |
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| 作者姓名： | 冯景星 |
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| 作者单位： | 福州大学物理系 |
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| 摘 要： | 结合扩散硅压阻式压力传感器的研制．根据硅的压阻效应原理，利用方形硅膜的应力分 布公式，论述了提高正方形硅膜压阻式压力传感器灵敏度的几个重要措施．
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| 关 键 词： | 硅膜 压力传感器 灵敏度 压阻 |
Important Measures for Increasing Sensitivity of Square Silicon Diaphragm Pressure Transducers |
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| Fen Jingxing. Important Measures for Increasing Sensitivity of Square Silicon Diaphragm Pressure Transducers[J]. Journal of Fuzhou University(Natural Science Edition), 1992, 0(3): 28-31 |
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| Authors: | Fen Jingxing |
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| Affiliation: | Department of Physics |
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| Abstract: | Based on the principle of silicon piezoresistive effect and the stress distribution formula of the square silicon diaphragm, some important measures must be take to increase the sensitivity of the square silicon diaphragm piezoresistive pressure transducers. |
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| Keywords: | silicon diaphragm pressure transducers sensitivity piezoresistive |
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