| 电容式微机械加速度计部分力学特性的分析 |
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| 引用本文： | 傅德生,苏伟,彭勃. 电容式微机械加速度计部分力学特性的分析[J]. 安徽工程科技学院学报：自然科学版, 2003, 18(4): 57-61 |
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| 作者姓名： | 傅德生 苏伟 彭勃 |
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| 作者单位： | 中国工程物理研究院,流体物理研究所,四川,绵阳,621900 |
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| 摘 要： | 推导了电容式微机械加速度计的悬臂梁在加速度作用下可能出现的两种挠度情况，分析了在制造过程中残余应力对于加速度计造成的影响，推导了电容式微加速度计的工作原理，并推荐了相应的工作模式．
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| 关 键 词： | 电容式微机械加速度计 力学特性 挠度 应力 差动电容 |
| 文章编号： | 1672-2477(2003)04-0057-05 |
| 修稿时间： | 2003-09-05 |
The analysis of some mechanical characteristics on capacitive micro-accelerometer |
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| FU De-sheng,SU Wei,PENG Bo. The analysis of some mechanical characteristics on capacitive micro-accelerometer[J]. Journal of Anhui University of Technology and Science, 2003, 18(4): 57-61 |
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| Authors: | FU De-sheng SU Wei PENG Bo |
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| Abstract: | Two cases of deflection of the beam of the micro-accelerometer occurred under a certain acceleration were deduced in the paper. And the effect of the residual stress to accelerometer during fabrication was analyzed. The working principle of the capacitive micro-accelerometer was deduced. And the related operating mode was recommended also. |
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| Keywords: | accelerometer deflection stress differential capacitive |
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