| 基于PC平台的高精度激光微加工系统的研制 |
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| 引用本文： | 貊泽强,余锦,樊仲维,刘洋,葛文琦,张雪,聂树真,郭广妍.基于PC平台的高精度激光微加工系统的研制[J].科学技术与工程,2013,13(21):6229-6234. |
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| 作者姓名： | 貊泽强 余锦 樊仲维 刘洋 葛文琦 张雪 聂树真 郭广妍 |
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| 作者单位： | 中国科学院光电研究院；中国科学院研究生院,中科院光电研究院,中科院光电研究院,中科院光电院,中科院光电院,中科院光电院,中科院光电院,中科院光电院 |
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| 基金项目： | 位置敏感阳极探测器图形加工系统 ;中国科学院重大资助项目 |
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| 摘 要： | 介绍了自主设计高精度皮秒激光微加工系统及其控制单元。首先在加工系统整体方案的设计上充分考虑了激光器的选择、光束质量、控制方式等对加工精度的影响。将高斯光束转化为平顶光束引入激光微加工。其次使用了一种位置比较脉冲的光机同步技术,使得激光脉冲在空间上均匀分布,改善了加工效果。最后在系统中加入了路径规划、实时监测及同步显示等功能,实现系统加工线宽达到3.64μm,绝对定位精度小于1μm的激光微加工。
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| 关 键 词： | 激光微细加工 控制系统 光束整形 光机同步 |
| 收稿时间： | 2013/1/20 0:00:00 |
| 修稿时间： | 2013/1/20 0:00:00 |
high-precision laser micromachining system based on PC |
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| mo ze qiang,yujin,FanZhongwei,liuyang,gewenqi,zhangxue,guoguangyan and Guo Guangyan.high-precision laser micromachining system based on PC[J].Science Technology and Engineering,2013,13(21):6229-6234. |
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| Authors: | mo ze qiang yujin FanZhongwei liuyang gewenqi zhangxue guoguangyan and Guo Guangyan |
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| Institution: | Chinese Academy of Science Academy of Opto-Electronics,Chinese Academy of Science Academy of Opto-Electronics,Chinese Academy of Science Academy of Opto-Electronics,Chinese Academy of Science Academy of Opto-Electronics,Chinese Academy of Science Academy of Opto-Electronics,Chinese Academy of Science Academy of Opto-Electronics,Chinese Academy of Science Academy of Opto-Electronics |
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| Abstract: | The independent design of high-precision picosecond laser micromachining system and its control unit is presented,First in the design of the overall program,the impact of choice of the laser, the beam quality ,control methods ware fully considerd for machining accuracy.Secondly using the Light machine synchronization technology which was called position compare output, laser pulse is spatially uniform distribution, improving the processing effect. In addition, path planning, the real-time monitoring and simultaneous display functions is added to system, ultimately the system processing linewidth control is 3.64 micron and absolute positioning accuracy is smaller than 1 micron. |
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