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A selective area growth double stack active layer electroabsorption modulator integrated with a distributed feedback laser
Authors:HongLiang Zhu  Song Liang  LingJuan Zhao  DuanHua Kong  NingHua Zhu  Wei Wang
Affiliation:Key Laboratory of Semiconductor Materials, Institute of Semiconductor, Chinese Academy of Sciences, Beijing 100083, China
Abstract:A new method for fabricating electroabsorption modulator integrated with a distributed feedback laser (EML) was proposed. With the method we fabricated a selective area growth double stack active layer EML (SAG-DSAL-EML). Through comparing with other fabrication methods of EMLs, the characters and the merits of the new method presented in this paper were discussed.
Keywords:electroabsorption modulator integrated with a DFB laser  selective area growth  Butt joint  double stack active layer
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