| 低频声表面波器件的设计与制作 |
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| 引用本文： | 张君衡,于军,彭刚,许四科. 低频声表面波器件的设计与制作[J]. 华中科技大学学报(自然科学版), 2005, 33(5): 85-87 |
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| 作者姓名： | 张君衡 于军 彭刚 许四科 |
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| 作者单位： | 华中科技大学,电子科学与技术系,湖北,武汉,430074 |
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| 基金项目： | 福建省科技攻关“十五”重点资助项目(2004AA201A). |
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| 摘 要： | 采用数字傅里叶变换技术设计并制作了一个中心频率为44MHz，1dB带宽为8MHz，带外抑制大于60dB，插损小于28dB的带通滤波器．发射和接收叉指换能器均采用数字傅里叶变换技术．整个声表面波滤波器的制作工艺流程是：基片抛光打磨、清洗、镀膜、匀胶、光刻、腐蚀和显影．实验结果分析表明此带通滤波器满足各项指标．
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| 关 键 词： | 声表面波滤波器 声表面波 数字傅里叶变换 |
| 文章编号： | 1671-4512(2005)05-0085-03 |
| 修稿时间： | 2004-09-13 |
Design of SAWF with low frequency and its fabrication |
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| Zhang Junheng,Yu Jun,Peng Gang,Xu Sike. Design of SAWF with low frequency and its fabrication[J]. JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE, 2005, 33(5): 85-87 |
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| Authors: | Zhang Junheng Yu Jun Peng Gang Xu Sike |
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| Affiliation: | Zhang Junheng Yu Jun Peng Gang Xu SikeZhang Junheng Postgraduate, Dept. of Electronic Sci. & Tech.,Huazhong Univ. of Sci. & Tech.,Wuhan 430074,China. |
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| Abstract: | The design of a surface acoustic wave filter (SAWF) with a center frequency of 44?MHz, a 1?dB bandwidth of 8?MHz, an out-of-band rejection of more than 60?dB and an insertion loss of less than 28?dB and its fabrication were described. After the design interdigital transducer (IDT), both emitting and receiving IDTs used by of discrete Fourier transform (DFT) was explained. The flow of the fabrication of SAWF, including polishing, cleanout, film growth, gluing, photolithography, etching, developing were listed. The result shows that all requirements are met. |
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| Keywords: | surface acoustic wave filter (SAW) surface acoustic wave (SAWF) discrete Fourier transform(DFT) |
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