| 非制冷式红外热像仪敏感元件动态特性的测试 |
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| 引用本文： | 彭冲,张培强,张青川.非制冷式红外热像仪敏感元件动态特性的测试[J].中国科学技术大学学报,2006,36(4):391-397. |
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| 作者姓名： | 彭冲 张培强 张青川 |
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| 作者单位： | 中国科学技术大学力学和机械工程系,安徽,合肥,230027;中国科学院力学行为和材料设计重点实验室,安徽,合肥,230027 |
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| 摘 要： | 介绍了对微型机械结构（非制冷式红外热像仪的敏感元件）的动态特性的测试方法的研究.分别用谱平面光学滤波法和主动零差光纤干涉法对敏感元件进行了测试,并与有限元模拟计算的结果进行了比较,结果接近.并将后者制作成一种MEMS的微结构测试系统.通过对测试方法的研究,我们得到了一些对敏感元件的设计和评估有重要指导作用的动态参数,也得到了一种有效的MEMS微结构动态测试方法.
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| 关 键 词： | 非制冷式红外热像仪 动态特性 谱面滤波 主动零差光纤干涉仪 |
| 文章编号： | 0253-2778(2006)04-0391-07 |
| 收稿时间： | 03 1 2004 12:00AM |
| 修稿时间： | 03 16 2006 12:00AM |
Measurement of dynamic properties of sensitive elements in uncooled IR imaging systems |
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| PENG Chong,ZHANG Pei-qiang,ZHANG Qing-chuan.Measurement of dynamic properties of sensitive elements in uncooled IR imaging systems[J].Journal of University of Science and Technology of China,2006,36(4):391-397. |
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| Authors: | PENG Chong ZHANG Pei-qiang ZHANG Qing-chuan |
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| Institution: | 1. Department of the Modern Mechanics, USTC, Hefei, 230027, China; 2.CAS Key Laboratory of Mechanical Behavior and Design of Materials, USTC, Hefei 230027,China |
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| Abstract: | The testing methods for evaluating the dynamic characteristics of micromechanical structures(the sensitive elements of uncooled IR imaging system) were reviewed.The sensitive elements were tested with spectra plane optic filtering method and active homodyne demodulation optic-fiber interferometer method.The results were compared with the ones from FEM model analysis and good accordance was achieved.A micromechanical structure test system for MEMS was then constructed with the latter method.Some important dynamic parameters were obtained from the study on the testing method,which can provide guidance for the design and evaluation of the sensitive elements,and an efficient micromechanical structure testing system for MEMS was also obtained. |
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| Keywords: | uncooled IR imaging system dynamic characteristic spectra plane optic filtering methed active homodyne optic-fiber interferometer |
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