基于RP的MEMS设计制造技术

在介绍快速成形技术以及微机电系统与微细加工技术的基础之上,对比分析了一些基于快速成形技术微细加工方法的优缺点及其最新研究成果.概述了MEMS设计存在的不足,介绍了与微器件再设计相关的基本材料信息库的建立与完善,借鉴虚拟制造的建模方法,以微集成机构为产品对象的桌面式微型工厂建模研究.在此基础上建立网上微器件设计中心.

Design and manufacturing technology of The MEMS Based on Rapid Prototyping

The new technologies of rapid prototyping and micro electro mechanical systems (MEMS) and its micro-fabrication are introduced, and the advantages and disadvantages of some micro-fabrications based on rapid prototyping and their new progress are contrastively analyzed. The design of microelements is the key factor for the development of the MEMS. The foundation of the basic information database system including the microelement cases database and material database was described. They are especially suitable for the fabrication of MEMS. The concept of desktop micro-factory for producing typical MEMS product-integrated mechanism is proposed. Based on the modeling method of virtual manufacturing. The system realized the MEMS design center in the construction of Web-ASP.