| 脉冲激光沉积ZnO薄膜动力学过程研究 |
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| 引用本文： | 胡春香,吴瑜之.脉冲激光沉积ZnO薄膜动力学过程研究[J].安庆师范学院学报(自然科学版),2008,14(3). |
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| 作者姓名： | 胡春香 吴瑜之 |
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| 作者单位： | 江西蓝天学院,江西,南昌,330098;江西蓝天学院,江西,南昌,330098 |
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| 摘 要： | 利用有限差分法对脉冲激光沉积(PLD)技术制备ZnO薄膜过程中等离子体在等温和绝热两个阶段的速度演化进行了研究,给出了其中主要粒子Zn和O在空间的具体演化规律。从模拟的结果可以看出,Zn,O在同一方向的速度演化趋势相似,在不同方向同种粒子速度演化趋势不同。
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| 关 键 词： | 脉冲激光沉积 等离子体羽辉 差分模拟 粒子速度 ZnO薄膜 |
Study on the Dynamics Process of Pulsed Laser Deposition of ZnO Thin Film |
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| HU Chun-xiang,WU Yu-zhi.Study on the Dynamics Process of Pulsed Laser Deposition of ZnO Thin Film[J].Journal of Anqing Teachers College(Natural Science Edition),2008,14(3). |
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| Authors: | HU Chun-xiang WU Yu-zhi |
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| Institution: | HU Chun-xiang,WU Yu-zhi(Jiangxi Blue Sky University Nanchang,Nanchang 330098,China) |
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| Abstract: | By finite difference method,the evolvement of plasma generated by a pulsed laser is studied for pulsed laser deposition of ZnO thin film.We discuss the movement of Zn and O particle in plasma in isothermal and adiabatic expansion stages in more detail.From the result of our simulation,the velocity movement in one orientation of Zn is similar to that of O;In different orientations,the velocity movement of the same particle is different. |
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| Keywords: | pulsed laser deposition plasma difference simulation velocity particle ZnO thin film |
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