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Local Structure of Ge/SI(100) Self—Assembled Quantum Dots
引用本文:Alexander V. Kolobov a) onleavefromA .F .IoffePhysico TechnicalInstitute,StPetersburg,Russia (Joint Research Center for Atom Technology National Institute of Advanced Industrial Science and Technology,Tsukuba Central 4,1 1 1 Higashi,Tsukuba 30. Local Structure of Ge/SI(100) Self—Assembled Quantum Dots[J]. 中国科学技术大学学报, 2001, 31(3): 282-288
作者姓名:Alexander V. Kolobov a) onleavefromA .F .IoffePhysico TechnicalInstitute  StPetersburg  Russia (Joint Research Center for Atom Technology National Institute of Advanced Industrial Science and Technology  Tsukuba Central 4  1 1 1 Higashi  Tsukuba 30
作者单位:JointResarchCenterofrAtomTechnology-NationalInstituteofAdvancedIndustrialScienceandTechnology,Tsukuba
基金项目:ThisworkwaspartlysupportedbyNEDOandtheEuropeanCommunity (MEL ARIprojectSIBOIANo.2 882 4 )andwasperformedintheJointResearchCent
摘    要:Thelatticemismatchbetweenthesubstrateandtheovergrownlayerallowstheformationofself as sembledquantumdots (QDs)throughtheStranski Krastanovmechanism[1,2 ] .Thistechniquehasbeensuccessfullyappliedtovarioussemiconductorsystems,andinparticulartoGe/Siquantumdots(Q…

关 键 词:自相似  锗量子点  局域结构  EXAFS  XANES

Local Structure of Ge/Si(100) Self-Assembled Quantum Dots
Kolobov.,AV HiroyukiOyanagi. Local Structure of Ge/Si(100) Self-Assembled Quantum Dots[J]. Journal of University of Science and Technology of China, 2001, 31(3): 282-288
Authors:Kolobov.  AV HiroyukiOyanagi
Abstract:Local structure of uncapped and Si capped Ge quantum dots grown on Si(100) has been probed by X ray absorption fine structure spectroscopy. It is found that the uncapped Ge dots are partially oxidized and partially alloyed with Si. The amount of Ge present in the Ge phase is found to be about 20 30%. In the Si capped sample, Ge is found to be dissolved in silicon, the fraction of Ge atoms existing as pure Ge phase being not more than 10%.
Keywords:Ge quantum dots  EXAFS  XANES
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