| 基于压电陶瓷的惯性驱动器控制技术研究 |
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| 引用本文： | 温建明,马继杰,程光明.基于压电陶瓷的惯性驱动器控制技术研究[J].黑龙江大学自然科学学报,2012,29(2):265-268. |
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| 作者姓名： | 温建明 马继杰 程光明 |
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| 作者单位： | 浙江师范大学精密机械研究所,金华,321004 |
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| 基金项目： | 国家自然科学基金资助项目，浙江省公益性技术应用研究计划项目，浙江省自然科学基金资助项目，浙江省教育厅资助项目 |
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| 摘 要： | 由于压电陶瓷迟滞效应和摩擦力非线性等因素影响,压电惯性驱动器开环控制存在着一定的误差,定位精度较低。为了提高压电惯性驱动器的定位精度,满足高精度控制的需要,提出了基于前馈补偿的模糊PID反馈混合控制器。设计了开环、前馈开环、模糊PID闭环反馈三种控制方式,对压电惯性驱动器定位精度的控制效果进行了相关的试验测试。试验表明,基于前馈补偿的模糊PID闭环反馈控制有效提高了压电惯性驱动器的定位精度,减小了稳态误差,在16μm的运动范围内,定位精度达到0.04μm。
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| 关 键 词： | 压电 惯性 驱动器 控制 |
Research on control technology of inertial actuator based on PZT |
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| WEN Jian-ming
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MA Ji-jie
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CHENG Guang-ming.Research on control technology of inertial actuator based on PZT[J].Journal of Natural Science of Heilongjiang University,2012,29(2):265-268. |
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| Authors: | WEN Jian-ming MA Ji-jie CHENG Guang-ming |
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| Institution: | (Institute of Precision Machinery,Zhejiang Normal University,Jinhua 321004,China) |
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| Abstract: | The piezoelectric inertial actuator with the open-loop control has a certain error and the positioning accuracy is low because of the influence of piezoelectric ceramic hysteresis and friction non-linear.In order to improve the positioning accuracy of piezoelectric inertial actuator and meet the needs of high-precision closed-loop control,the fuzzy PID feedback hybrid controller based on feed-forward compensation is designed.Compared the positioning accuracy of the piezoelectric inertial actuator controlled by open-loop,feed-forward,fuzzy PID closed-loop feedback control and the relevant tests are carried out.The experimental results showed that the fuzzy PID feedback hybrid controller based on feed-forward compensation can effectively improve the positioning accuracy of the piezoelectric inertial actuator and reduce the steady-state error,the positioning accuracy of 0.04 μm is obtained in the 16μm range of motion |
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| Keywords: | piezoelectricity inertial actuator control |
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