| 溶胶凝胶法制备（ Ba0.3Sr0.7）（Zn1/3Nb2/3）O3微波介质陶瓷薄膜 |
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| 引用本文： | 杨龙,王锐,石锋.溶胶凝胶法制备（ Ba0.3Sr0.7）（Zn1/3Nb2/3）O3微波介质陶瓷薄膜[J].山东师范大学学报(自然科学版),2012,27(1):57-59. |
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| 作者姓名： | 杨龙 王锐 石锋 |
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| 作者单位： | 1. 山东师范大学物理与电子科学学院,250014,济南
2. 山东师范大学科学技术处,250014,济南 |
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| 基金项目： | 国家自然科学基金资助项目（51042001）. |
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| 摘 要： | 以柠檬酸和乙酰丙酮为络合剂和稳定剂,金属硝酸盐为起始原料制备溶胶.采用甩胶旋涂法在Pt/Ti/SiO2/Si基片上制膜并在O2环境下退火,重复3次制得所需薄膜.采用XRD,FTIR和SEM分析薄膜的结晶性,微观结构和表面形貌.结果表明：制备的薄膜主晶相为（Ba0.3Sr0.7）（Zn1/3Nb2/3）O3,伴有少量的第二相,同时,薄膜表面致密,无气孔,结晶良好,结晶颗粒均匀分布于薄膜的表面.
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| 关 键 词： | 微波介质陶瓷薄膜 溶胶凝胶法 形貌 |
FABRICATION OF ( Ba0.3Sr0.7 ) ( Zn1/3Nb2/3 ) O3 MICROWAVE DIELECTRIC CERAMIC THIN FILMS BY SOL-GEL |
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| Yang Long
,
Wang Rui
,
Shi Feng.FABRICATION OF ( Ba0.3Sr0.7 ) ( Zn1/3Nb2/3 ) O3 MICROWAVE DIELECTRIC CERAMIC THIN FILMS BY SOL-GEL[J].Journal of Shandong Normal University(Natural Science),2012,27(1):57-59. |
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| Authors: | Yang Long Wang Rui Shi Feng |
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| Institution: | Yang Long Wang Rui Shi Feng ( 1 ) School of Physics and Electronics, Shandong Normal University, 250014, Jinan, China; 2) Science and Technology Department, Shandong Normal University, 250014, Jinan, China ) |
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| Abstract: | Inexpensive metal nitrates and barium acetate instead of metal alkoxides were used as raw materials, and high quality sol was obtained by utilization of acetylacetone and citric acid. Microwave dielectric ceramic （Ba0.3Sr0.7 ）（Znl/3Nb2/3 ）03 thin film was fabricated on Pt/Ti/SiO2/Si substrates by spin- coating, then annealed in the environment of oxygen. X - ray diffraction （ XRD ）, Fourier transform infrared spectrometer （FTIR） ,and scanning electron microscope （SEM） were used to study the microstructures and morphological properties of the thin film. The results revealed that the main phases of the thin film were （Ba0.3Sr0.7 ） （Zn1/3Nb2/3 ） 03 with less second phase. The thin film was compact in surface and well crystallized without crack. |
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| Keywords: | ceramic thin films Sol- Gel morphology |
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