Damage of Interconnects by Electromigration Induced Surface Evolution |
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引用本文: | 赵智军,杨卫. Damage of Interconnects by Electromigration Induced Surface Evolution[J]. 清华大学学报, 1997, 0(2) |
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作者姓名: | 赵智军 杨卫 |
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作者单位: | Zhao Zhijun,Yang Wei Department of Engineering Mechanics,Tsinghua University,Beijing 100084 |
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摘 要: | DamageofInterconnectsbyElectromigrationInducedSurfaceEvolution*ZhaoZhijun(赵智军),YangWei(杨卫)DepartmentofEngineeringMechanics,Ts...
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Damage of Interconnects by Electromigration Induced Surface Evolution * |
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Abstract: | |
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Keywords: | electromigration surface evolution thin film interconnect |
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