| Damage of Interconnects by Electromigration Induced Surface Evolution |
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| 引用本文： | 赵智军,杨卫. Damage of Interconnects by Electromigration Induced Surface Evolution[J]. 清华大学学报, 1997, 0(2) |
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| 作者姓名： | 赵智军 杨卫 |
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| 作者单位： | Zhao Zhijun，Yang Wei Department of Engineering Mechanics，Tsinghua University，Beijing 100084 |
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| 摘 要： | ＤａｍａｇｅｏｆＩｎｔｅｒｃｏｎｎｅｃｔｓｂｙＥｌｅｃｔｒｏｍｉｇｒａｔｉｏｎＩｎｄｕｃｅｄＳｕｒｆａｃｅＥｖｏｌｕｔｉｏｎ＊ＺｈａｏＺｈｉｊｕｎ（赵智军），ＹａｎｇＷｅｉ（杨卫）ＤｅｐａｒｔｍｅｎｔｏｆＥｎｇｉｎｅｅｒｉｎｇＭｅｃｈａｎｉｃｓ，Ｔｓ...
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Damage of Interconnects by Electromigration Induced Surface Evolution * |
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| Abstract: | |
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| Keywords: | electromigration surface evolution thin film interconnect |
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