用于测量流体流量的复合式传感器

为了适应小型智能化测量仪器仪表发展对传感顺的新要求，提出一种用于测量管道中气体流量的、由一只静压和一只差压传感器构成的复合式传感器。论述了这种新型传感器的测量原理，介绍了传感器和压阻芯片的结构设计及制作，并列举出测试结果。在测量可压缩流体的流量时，此传感器能同时显示出流体的压力和差压。若将此传感器与单片机连接，流体的流量也可显示出来。

A Compound Type of Sensor for Measuring Fluid Discharge

In order to cope with the new demands for sensors to be used in mini type intelligence measuring instruments and meters, a kind of compound sensor (consisting of one pressure sensor, and one pressure difference sensor) to be used in measuring gas discharge in pipeline is developed. This paper deals with the measuring principle of the new type of sensor, describes the structural design and manufacturing of the sensor and chips, and lists the measured results. In measuring the discharge of compressable fluid, this sensor can display the fluid pressure and pressure difference simultaneously. If the sensor is connected with a monolithic microcomputer, the fluid discharge can also be displayed.