| 利用金相显微镜焦平面测量微米级膜层厚度 |
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| 引用本文： | 唐杰,金永中,孙亚丽,左由兵. 利用金相显微镜焦平面测量微米级膜层厚度[J]. 四川理工学院学报(自然科学版), 2006, 19(2): 108-110 |
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| 作者姓名： | 唐杰 金永中 孙亚丽 左由兵 |
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| 作者单位： | 四川理工学院材料与化学工程系,四川,自贡,643000;四川理工学院材料与化学工程系,四川,自贡,643000;四川理工学院材料与化学工程系,四川,自贡,643000;四川理工学院材料与化学工程系,四川,自贡,643000 |
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| 摘 要： | 介绍了一种利用金相显微镜聚焦面测量各种涂/镀层厚度的方法。将实验样品的覆膜面打磨成斜面后平放在金相显微镜样品台上,分别对膜层的两个界面对焦,从对焦旋钮上读出两焦面的高度差即为膜层的厚度。本方法可用于各种微米量级的单一膜层和多层复合膜的测厚,在测厚的同时可以观察和分析膜层的显微结构。尤其适用于各种涂/镀膜实验样品的研究分析。
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| 关 键 词： | 测厚 金相显微镜 膜层 |
| 文章编号： | 1673-1549(2006)02-0108-03 |
| 修稿时间： | 2005-08-28 |
To Measure the Thickness of Films in Micron with the Focal Planes of a Metalloscope |
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| TANG Jie,JIN Yong-zhong,SUN Ya-li,ZUO You-bing. To Measure the Thickness of Films in Micron with the Focal Planes of a Metalloscope[J]. Journal of Sichuan University of Science & Engineering(Natural Science Editton), 2006, 19(2): 108-110 |
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| Authors: | TANG Jie JIN Yong-zhong SUN Ya-li ZUO You-bing |
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| Abstract: | A method is introduced to measure the thickness of films with the focal plane of a metalloscope in the paver.A sample is put on the table which is processed into a inclined plane on the filmed plane,and two interfaces of a film are focalized,then the thickness is read out that is a difference between the heights of two interfaces of a film.This method applies to measure the thickness of the one/more film in micron,the microstructure of films would be observed and studied the while.Therefore,it is applicable for research into the films in the laboratory. |
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| Keywords: | measure the thickness metalloscope film |
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