微定位器中柔性铰链结构的有限元分析及改进

微定位器是微机械系统精密加工、纳米技术的重要组成部分,柔性铰链结构则是微定位器的核心部件。利用有限元分析软件ANSYS,对两种常见铰链进行了分析,研究了其几何参数对结构的刚度、运动方向精度的影响;证明了在微动范围内,柔性铰链结构的刚度不随输出点的线位移的大小变化而变化,是常数,且刚度与结构的运动方向精度不成简单的线性关系。在此基础上,提出一种改进型柔性铰链结构,各项性能指标得到了改善。

Analysis and improvements on the structure of flexure hinge in micropositioner by using finite element

Micropositioner is an indispensable part of the micro-machinery precise manufacturing techniques and nanotechniques. Flexure hinge is an essential component of micropositioner. In this paper, two typical flexure hinges are studied by using ANSYS and the influence of their geometrical dimensions on the stiffness and motion precision is analyzed as well. The stiffness does not change with the linear displacement. Instead, It is a constant and is not linear with its directional accuracy providing the displacement is microscale. Based on this, a new flexure hinge is presented, which has proved to have better performance comparing with the previous ones.