| 衬底对沉积类金刚石薄膜结构和摩擦学性能的影响 |
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| 引用本文： | 常海波,徐洮,张治军,刘惠文. 衬底对沉积类金刚石薄膜结构和摩擦学性能的影响[J]. 河南大学学报(自然科学版), 2005, 35(4): 32-34 |
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| 作者姓名： | 常海波 徐洮 张治军 刘惠文 |
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| 作者单位： | 河南大学,化学化工学院,河南,开封,475001;中国科学院兰州化学物理研究所,固体润滑国家重点实验室,兰州,730000;河南大学,特种功能材料实验室,河南,开封,475001 |
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| 基金项目： | 国家“863”计划资助项目（2002AA302607） |
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| 摘 要： | 利用直流-射频等离子化学气相沉积技术在玻璃、硅和钢表面沉积得到了薄膜，并用拉曼光谱和原子力对薄膜的结构和形貌进行了表征，用静动摩擦实验机对薄膜的摩擦学性能进行了测试．结果表明：沉积在硅和钢表面的薄膜具有典型类金刚石薄膜的特征，而沉积在玻璃表面的薄膜呈现类聚合物结构的特征，且沉积在玻璃表面的薄膜具有比较粗糙的表面，而沉积在硅表面的薄膜则比较光滑致密．摩擦学实验表明，沉积在硅表面的薄膜具有良好的摩擦学性能．
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| 关 键 词： | 衬底 类金刚石薄膜 结构 摩擦学性能 |
| 文章编号： | 1003-4978（2005）04-0032-03 |
| 收稿时间： | 2004-08-11 |
| 修稿时间： | 2004-08-11 |
Effect of Substrate on the Structure and Tribological Properities of Diamond-like Carbon Films |
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| CHANG Hai-bo,XU Tao,ZHANG Zhi-jun,Liu Hui-wen. Effect of Substrate on the Structure and Tribological Properities of Diamond-like Carbon Films[J]. Journal of Henan University(Natural Science), 2005, 35(4): 32-34 |
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| Authors: | CHANG Hai-bo XU Tao ZHANG Zhi-jun Liu Hui-wen |
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| Affiliation: | 1. Chemistry and Chemical Engineering College of Henan University, Henan Kaifeng 475001, China; 2. Laboratory of Special Functional Materials, Henan University, Henan Kaifeng 475001, China; 3. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
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| Abstract: | Diamond-like carbon films were simultaneously prepared on the different substrates(glass,silicon;steel) by direct current radio frequency plasma enhanced chemical vapor deposition(DC-RFPECVD).The structure and morphology of the films was investigated by Raman spectroscopy and atomic force microscopy.The tribological behavior of the DLC films sliding against a Si_(3)N_(4) ball was investigated on a DF-PM unidirectional friction coefficient measurement apparatus.The result showed that the films deposited on silicon substrate and steel substrate had typical diamond-like characteristics and the film on silicon had smooth surface,but the film on the glass substrate had an polymer-like structure with rough surface.Moreover the film on thesilicon substrate had good friction-reducing and antiwear behavior. |
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| Keywords: | substrate diamond-like carbon films structure tribological properties |
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