| 应变SiGe SOI p-MOSFET温度特性研究 |
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| 引用本文： | 刘静,高勇,黄媛媛. 应变SiGe SOI p-MOSFET温度特性研究[J]. 西安理工大学学报, 2008, 24(4) |
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| 作者姓名： | 刘静 高勇 黄媛媛 |
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| 作者单位： | 西安理工大学,自动化与信息工程学院,陕西,西安,710048 |
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| 基金项目： | 国家自然科学基金，教育部高等学校博士学科点专项科研基金，西安理工大学校科研和教改项目 |
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| 摘 要： | SiGe SOI p-MOSFET在高频、高速、低功耗、抗辐射方面具有极大的优势。但二氧化硅埋层较低的热导率以及SiGe材料较低的热稳定性，使器件内部自加热效应的减弱或消除成为提高器件温度特性的关键因素。对应变SiGe SOI p-MOSFET温度特性机理进行研究，给出了三种缓解MOS—FET器件内部自加热效应的结构，并对其效果进行对比分析。结果表明：DSOI结构不适宜于低压全耗尽型SOI器件；Si3N4-DSOI结构对自加热的改善幅度较小；Si3N4埋层结构效果最好，尤其在低温领域改善更为明显。
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| 关 键 词： | 自加热效应 热稳定性 驱动电流 |
Research on Temperature Characteristics of SOI p-MOSFET with Strained SiGe Channel |
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| LIU Jing,GAO Yong,HUANG Yuan-yuan. Research on Temperature Characteristics of SOI p-MOSFET with Strained SiGe Channel[J]. Journal of Xi'an University of Technology, 2008, 24(4) |
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| Authors: | LIU Jing GAO Yong HUANG Yuan-yuan |
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| Affiliation: | LIU Jing,GAO Yong,HUANG Yuan-yuan(Faculty of Automation , Information Engineering,Xi'an University of Technology,Xi'an 710048,China) |
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| Abstract: | The SOI p-MOSFET with strained SiGe channel has a great advantage in high-frequency,high-speed,low-power and anti-radiation.Because of lower thermal-stability of SiGe and lower heat-conductivity of SiO2,the temperature characteristics of SOI p-MOSFET with strained SiGe channel can be improved when internal self-heating effect of device is weakened or eliminated.The temperature characteristics mechanisms of the SOI p-MOSFET with strained SiGe channel are analyzed.Three kinds of structures are given to deduce... |
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| Keywords: | self-heating effect thermal-stability drive current |
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